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SS4B Grower - 12inch(Semi)
Grower for Φ300mm semi
| Typical Ingot Diameter | 12inch Semiconductor Grower, Superconducting Magnet type |
|---|---|
| Charge Amount | Normal 400kg / 440kg(With additional charge tool) |
| Hot Zone Size | Normal 32inch (Change 36inch can be possible if hot zone is changing accordingly) |
| Crystal Length | Approx. 2,000mm with ingot diameter 308mm |
| Pull Chamber Length | 3,000mm or 3,300mm |
| Seed Pulling Speed(slow) | 0.100 ~ 6.2mm/min(fast 1,200mm/min) |
| Seed Rotating Speed | 1.00 ~ 30.00rpm / Accuracy : 15rpm, Within 1% |
| Crucible Lifting Speed(slow) | Slow 0.100 ~ 1.300mm/min(fast 260mm/min) |
| Crucible Lifting Capacity | Approx. 1,000kg |
| Crucible Rotating Speed | 0.10 ~ 20.00rpm |
| Crucible Lifting Stroke | Available up to 750mm |
| Power Supply Max. Power | Side heater 180kW / Bottom heater 50kW |
| Chamber Materials | Inside : SUS316L / Outside : SUS304 |
| Max. Height | Approx. 10,107(close), 10,807(open)mm |
| Ar Pressure / Flow | 2 ~ 3kg/cm2, Max. flow : 200lpm |
| Air Pressure (Valve control) | 4 ~ 6kg/cm2, Max. flow : 100lpm |
| Cooling Water Pressure | 2 ~ 3kg/cm2 / Max 5kg/cm2 |
| Water Consumption | Approx. 700 ~ 800lpm |
| Cooling Water Temp. | Customer’s Spec |
S530B Grower - 460mm Cathode
Cathode dedicated grower
| Typical Ingot Diameter | 460mm Grower, Superconducting Magnet type (Available up to 530mm) |
|---|---|
| Charge Amount | Normal 400kg / 560kg(With additional charge tool) |
| Hot Zone Size | Normal 32inch (Change 36inch can be possible if hot zone is changing accordingly) |
| Crystal Length | Approx. 1,200mm with ingot diameter 460mm |
| Pull Chamber Length | 3,100mm |
| Seed Pulling Speed(slow) | 0.100 ~ 3.800mm/min(fast 770mm/min) / Accuracy : 1mm/min, Within ± 1% |
| Seed Rotating Speed | 1.00 ~ 30.00rpm / Accuracy : 15rpm, Within 1% |
| Crucible Lifting Speed(slow) | 0.010 ~ 1.300mm/min(fast 260mm/min) / Accuracy : 0.014 ~ 0.62 mm/min, Within 1% |
| Crucible Lifting Capacity | Approx. 1,000 kg |
| Crucible Rotating Speed | 0.10 ~ 20.00rpm / Accuracy : Within 1% |
| Crucible Lifting Stroke | Available up to 850mm |
| Power Supply Max. Power | Side heater 250kW / Bottom heater 100kW |
| Chamber Materials | Inside : SUS316L / Outside : SUS304 |
| Max. Height | Approx. 11,185mm(close), 11,198.5mm(open) |
| Ar Pressure / Flow | 2 ~ 3kg/cm2, Max. flow : 200lpm |
| Air Pressure (Valve control) | 4 ~ 6kg/cm2, Max. flow : 100lpm |
| Cooling Water Pressure | 2 ~ 3kg/cm2 / Max 5kg/cm2 |
| Water Consumption | Approx. 700 ~ 800lpm |
| Cooling Water Temp. | Customer’s Spec |
